Dr. Takahiro Namazu’s Review Paper Selected as Wiley Top Downloaded Article

Dr. Takahiro Namazu’s review paper “Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review” submitted to IEEJ Transactions on Electrical and Electronic Engineering has been selected as a Wiley Top Downloaded Article.

This paper summarizes mechanical property measurement techniques developed so far, typical mechanical properties of various types of materials, and those size effects on mechanical properties of micro- to nano-sized materials used in semiconductor devices such as ICs and MEMS (Micro Electro Mechanical Systems). Dr. Namazu has been developing unique mechanical experiment equipment and techniques in this field for many years. By measuring the mechanical properties of a wide variety of materials such as silicon-based materials, metal thin films, and polymer films at the micro-to-nano size, he has clarified physical phenomena that occur in the micro/nano size. Micro-sized material properties are essential for the safe design of ICs and MEMS. Many of the mechanical properties of nanomaterials, which are difficult to accurately measure, are still unknown. Many researchers and engineers have been very interested in the article. Please have a read here!

(Hiroshi Kawakami, Faculty of Engineering)