Professor Tabata Receives the JSME Micro-Nano Engineering Division Achievement Award

Professor Osamu Tabata, Faculty of Engineering, KUAS received the 9th Japan Society of Mechanical Engineers Micro-Nano Engineering Division Award (Achievement Award). It is awarded to individuals or groups who have made internationally acclaimed contributions to the development and completion of research and technology systems in the field of micro-nano engineering and have made outstanding contributions to the development and revitalization of the division.

Professor Tabata received the award for his research on “the creation of micro- and nano-systems,” at the ceremony held in the 15th Micro- and Nano-Engineering Symposium on 25 November 2024.

Professor Tabata has developed a design theory for creating novel micro-nano electromechanical systems using research and development of unique processing and integration technologies for producing micro- and nano-scale sensors and actuators and has produced many pioneering research results.

His main achievements include the development of single-crystal silicon anisotropic etching technology using organic alkaline aqueous solutions, process technology for CMOS integrated sensors, pressure sensors, acceleration sensors, infrared image sensors, and so on. These have contributed significantly to academic research and industrial applications of micro- and nano-scale electromechanical systems.

(Professor Hiroshi Kawakami, Faculty of Engineering)